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Untitled Document
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| Diameter |
1" |
2" |
3" |
4" |
5" |
6" |
8" |
12" |
| Growing Method |
CZ, FZ |
| Grade |
Prime, Normal Test, Low Test, Dummy |
| Type/Dopant |
P(Boron), N (Phos, Antimony, Arsenic) |
| Orientation |
<100>,<111>,<110>,<510>,<113> |
| Resistivity |
0.001 ~ 100,000 Ohm Cm |
| Thickness(SEMI) |
Random |
280㎛ |
380㎛ |
525㎛ |
625㎛ |
675㎛ |
725㎛ |
775㎛ |
| Thickness(JEIDA) |
Random |
280㎛ |
380㎛ |
525㎛ |
625㎛ |
675㎛ |
725㎛ |
775㎛ |
| Surface |
One Side Polished, Double Side Polished, Lapped, Etched, Sliced |
| Backside |
Etched, Polished, Lapped, Sliced |
| Special Option |
| Diameter |
Customer's Demand Diameter |
| Off Orientation |
Customer's Demand Angle (Ex : 9.74, 25, 30 Off Angle) |
| Thickness |
Customer's Demand Thickness(Thining & Thick) |
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| Service |
Thickness |
Delivery |
Variation |
| Thermal Oxidation (4"~12") |
300Å ~ 20,000Å |
2주 |
± 5% |
| Nitride |
1,500Å ~ 3,000Å |
2주 |
± 5% |
| Dicing |
Customerized |
2주 |
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| Sputtering (4"~12") |
Customerized |
2주 |
± 10% |
| 가능 Target : Ni,Cr,Ni+Cr,Al,1%Si+Al,Ti,TiN,ITO,IZO,Pt,Au,Ta |
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| Diameter |
1" |
2" |
3" |
4" |
5" |
6" |
8" |
12" |
| Growing Method |
CZ, FZ |
| Type/Dopant |
P(Boron), N (Phos, Antimony) |
| Orientation |
<100>,<111> |
| Resistivity |
Customer's Demand Resistivity |
| Length |
Customer's Demand Length |
| Surface |
As Grown, Grinding, etc. |
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| Category |
Description |
| Diameter |
155±3mm or 200±1.0mm (Un-Grinding) |
| Conduction Type |
P-TYPE(BORON) |
| Orientation |
<100> |
| Bulk Lifetime |
>10㎲ |
| Resistivity |
0.5 ~ 3.0Ω-cm |
| Oxygen Content |
0.0 ~ 22.0 ppma |
| Carbon Content |
1 ~ 3 ppma |
| Length |
~ 200mm |
| Defect |
Free Slip Dislocation |
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